Naval Research Laboratory (NRL)
FederalDC
Posted
Sep 1, 2026
Sep 14, 2026
Atomic Layer Deposition (ALD) Reactor System
The Naval Research Laboratory is seeking an atomic layer deposition (ALD) reactor system for uniform and conformal deposition of oxide, nitride, and metal films on substrates with high-aspect-ratio topographies. The system must support substrates or wafers of at least 150 mm, accommodate at least eight precursor sources expandable to twelve, and include at least four process-gas lines. This is an active commercial-item combined synopsis/solicitation and request for quotations set aside for small businesses, not a grant program.