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CHIPS R&D Beamline Residual Gas Analyzer

Description: The National Institute of Standards and Technology is seeking residual gas analyzers to support semiconductor metrology and extreme-ultraviolet calibration work at the SURF III synchrotron radiation facility. The requirement includes two MKS MicroVision 2 residual gas analyzers, two pressure transducers, two pressure protection cables, and two replacement filaments, all new and in original manufacturer packaging. This total small-business set-aside solicitation is due September 14, 2026, at 12:00 p.m. EDT.

Buyer: Department of Commerce NIST
Federal · MD, US
Released: Sep 8, 2026
Closes: Sep 14, 2026(4 days left)

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Key Contacts

Decision makers connected to this RFP from Department of Commerce NIST.

Mark S. MadsenActing Chief Counsel

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Andy WrightActing Chief Facilities Management Officer (CFMO) and Director of the Office of Facilities and Property Management (OFPM)

*******@************

+1 (***) ***-****

Nahla IvyChief, Enterprise Risk Management Office

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Sean SellChief Information Officer (Acting)

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